All plist in /Library/LaunchDaemons won't run

I succesfully installed Samba 3 on my new new Mac Mini running OSX Lion. I then tried adding a plist to launch it in /Library/LaunchDaemons. In doing so I fiddled around with direcotry and file permissions. The plist didn't work so I removed it, but now it seems that none of the plist will run at all!

After a little Google research I have tried setting the owner back to root, the group to wheel, and the permissions to 644. Still no plist load on boot. I even tried running "sudo launchctl start com.parallels.desktop.launchdaemon" and so on, on each plist. It just spits back "Start error: No such process".

What the heck have I done, and how do I fix it?