Can I delete the GeoServices Regional Resources Folder from the Library Cache Folder?

I'm suddenly unable to complete hard drive backup using LaCie SilverKeeper. Get "Status: Operation aborted due to excess errors." "File data size wrong" in the Library:Cache:GeoServices:Regional Resources Folder.

It then lists various files as size-0, sb(should be)-693, etc.

Can I just drag this folder to the trash and restart to rebuild? Assume its part of the Maps?