Cache Files consumes a lot of memory. How can I delete them?

Simplest not intrusive way .

Suggest restarting in Safe Mode. This will perform a Disk Repair, clear cache files and only load Apple Software, extensions and fonts. The boot up will be slow and can take some time - Normal.

If, as perviously mentioned, Empty Disk Space is the issue >>

It is suggested to keep at least 15% to 20% of the Drive Total Capacity as Empty Space for good operations of the computer and for additional updates to Monterey to download, expand and install.

Cached files is not your problem, as that is just “FREE” memory that happens to remember what was previously in it and can be either reused if you access that file again or the memory can be repurposed for another tasks needs.

App memory, Compressed memory and Wired memory are the only memory that cannot easily be reused without the need to page to disk. Wired memory being the least available for other tasks.

HOWEVER, if your boot disk free storage is low, that could prevent paging and swapping to disk/SSD/NVMe storage.

but if you want to increase power usage, reduce battery life, and slow down your Mac, then the following command will purge your file system cache

sudo purge